-기본 사양 

• SMU : Source monitor unit Display resolution: 6 digits at each current range (0.01 fA display resolution at 10 pA range)

• MPSMU 4 EA : Medium Power SMU (10 fA/2 μV to 100 mA/100 V)

• VMU 2 EA : Voltage Monitor Unit (0.2 μV resolution in differential mode)

• VSU 2 EA : Voltage Source Unit

• HPSMU : High Power SMU (10 fA/2 μV to 1 A/200 V)

• PGU : Pulse Generator Unit (1 channel)

• 41501B(Optional) : 2 x PGU(Option), HPSMU(Option) or 2Xmpsmu(Option)

• GNDU : Ground Unit