주요기능
- 180 W of Continuous Power
- Scalable, Flexible, High Speed Architecture
- Part of 26xx Family with TSP / TSP-Link
- Channel synchronization = 500nSec with built-in Trigger Controller
- Fully isolated, independent channels enable true SMU-per-pin testing
“Improve productivity in many applications across R&D, Reliability, and Production”
- Sub-pA Resolution
- 1nA range with 10fA default resolution
“Widest dynamic range to support requirements of next-generation devices”
- 1nA range with 10fA default resolution
- 180 W of Pulsed Power
- Most powerful High Voltage SMU on the market
- High Speed and High Accuracy A/D Converters (two of each type)
- True 1 uSec per point sampling with 18-bit digitizing A/D (both V and I)
- Full line-cycle integration with 22-bit integrating A/D (both V and I)
Features |
Benefits |
| 3,000V at up to 180W of power | Easily captures important parametric data that other equipment can’t |
| 1fA resolution | Supports the low-leakage requirements of next-generation devices |
| 2 sets of high speed (1μs), high accuracy (22-bit) A/D converters | Characterizes transient and steady-state behavior precisely, including rapidly changing thermal effects |
| Scalable, flexible, high speed TSP®/TSP-Link® architecture | Improves productivity in R&D, reliability, and production applications |
| 4-quadrant design | Capable of sourcing and sinking both voltage and current to provide more complete test solutions |
- 3KV @ 20mA
- 1.5KV @ 120mA
- 180W of Continuous Power
- 180W of Pulsed Power
Typical Pulse Widths- 3KV = 15ms
- 1KV = 5ms
- 500V = <2ms
- True 1uSec per point, 18 bit digitizing ADCs on V and I
- TSP based Multi-channel expansion with 500nSec sync.
